scope:

This Standard specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones, and separative devices as defined in JIS B 9917-7.

Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0.1 μm to 5 μm are considered for classification purposes.

The use of light scattering airborne particle counters (LSAPCs) is the basis for determination of the concentration of airborne particles at designated sampling locations. Concentrations of ultrafine particles (particles smaller than 0.1 μm) will be addressed in a separate standard. An M descriptor (see Annex C) may be used to quantify populations of macroparticles (particles larger than 5 μm).

This Standard cannot be used to characterize the physical, chemical, radiological, viable or other nature of airborne particles.

NOTE The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows.

ISO 14644-1:2015 Cleanrooms and associated controlled environments-Part 1: Classification of air cleanliness by particle concentration (MOD)

In addition, symbols which denote the degree of correspondence in the contents between the relevant International Standard and JIS are IDT (identical), MOD (modified), and NEQ (not equivalent) according to ISO/IEC Guide 21-1.