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IEST-RP-CC028

MINIENVIRONMENTS

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Organization: IEST
Publication Date: 1 December 2002
Status: active
Page Count: 28
scope:

The purpose of this document is to provide a framework for describing minienvironments for microelectronics and similar applications.

Applications, planning, design, and evaluation are discussed in detail.

This Recommended Practice is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.This Recommended Practice does not address microbiological issues or applications.

Document History

IEST-RP-CC028
December 1, 2002
MINIENVIRONMENTS
The purpose of this document is to provide a framework for describing minienvironments for microelectronics and similar applications. Applications, planning, design, and evaluation are discussed in...

References

This document references:
NFPA 318 - Standard for the Protection of Semiconductor Fabrication Facilities
Published by NFPA on January 1, 2018
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
This document references:
IEST-RP-CC024 - MEASURING AND REPORTING VIBRATION IN MICROELECTRONICS FACILITIES
Published by IEST on December 1, 2002
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for...
This document references:
EN 50082-2 - Electromagnetic Compatibility Generic Immunity Standard Part 2: Industrial Environment
Published by CENELEC on March 1, 1995
A description is not available for this item.
This document references:
IEEE C63.14 - Dictionary of Electromagnetic Compatibility (EMC) including Electromagnetic Environmental Effects (E3)
Published by IEEE on January 1, 2014
This standard provides definitions of terms associated with electromagnetic environmental effects including electromagnetic compatibility (EMC), electromagnetic pulse (EMP), and electrostatic...
This document references:
EN 55011 - Industrial, scientific and medical equipment - Radio-frequency disturbance characteristics - Limits and methods of measurement
Published by CENELEC on April 1, 2016
This International Standard applies to industrial, scientific and medical electrical equipment operating in the frequency range 0 Hz to 400 GHz and to domestic and similar appliances designed to...
This document is referenced by:
IEST-RP-CC012 - CONSIDERATIONS IN CLEANROOM DESIGN
Published by IEST on February 1, 2015
This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically...
This document is referenced by:
ASHRAE APPLICATIONS I-P - 2019 ASHRAE HANDBOOK Heating, Ventilating, and Air-Conditioning APPLICATION Inch-Pound Edition
Published by ASHRAE on January 1, 2019
A description is not available for this item.
This document is referenced by:
IEST-RP-CC022 - ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
Published by IEST on January 1, 2004
This Recommended Practice (RP) discusses methods for specifying and evaluating the effectiveness of techniques for controlling electrostatic charge. Proper control of electrostatic charge may reduce...
This document is referenced by:
HVAC APPLICATIONS IP CH 16 - LABORATORIES
Published by ASHRAE on January 1, 2015
A description is not available for this item.
This document is referenced by:
IEST-RP-CC019 - Qualifications for Organizations Engaged in the Testing and Certification of Cleanrooms and Clean-Air Devices
Published by IEST on January 1, 2006
This Recommended Practice (RP) defines recommended qualifications for organizations engaged in the testing and certification of cleanrooms, clean-air devices, HEPA- and ULPA-filtered systems, and...
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