CEI EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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| Organization: | CEI |
| Publication Date: | 1 November 2016 |
| Status: | active |
| Page Count: | 40 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 defines terms for micro-electromechani
Document History
CEI EN 62047-1
November 1, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
February 1, 2007
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
La presente Norma fa parte della serie EN/IEC 62407 e si occupa di terminologia.
In particolare la Norma è un glossario dei termini e delle definizioni standard relativamente ai dispositivi...