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CEI EN 62047-1

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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Organization: CEI
Publication Date: 1 November 2016
Status: active
Page Count: 40
ICS Code (Other semiconductor devices): 31.080.99
scope:

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Document History

CEI EN 62047-1
November 1, 2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
February 1, 2007
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
La presente Norma fa parte della serie EN/IEC 62407 e si occupa di terminologia. In particolare la Norma è un glossario dei termini e delle definizioni standard relativamente ai dispositivi...

References

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