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ISO 11938

Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

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Organization: ISO
Publication Date: 1 March 2012
Status: active
Page Count: 18
ICS Code (Physicochemical methods of analysis): 71.040.50
scope:

This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X-ray intensity data method, the k-value method, the calibration method, the correlation method and the matrix correction method.

Document History

ISO 11938
March 1, 2012
Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy
This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving...

References

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