scope:

This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X-ray intensity data method, the k-value method, the calibration method, the correlation method and the matrix correction method.