BSI - BS EN 62047-11
Semiconductor devices — Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
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| Organization: | BSI |
| Publication Date: | 31 October 2013 |
| Status: | active |
| Page Count: | 24 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS EN 62047-11
October 31, 2013
Semiconductor devices — Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
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