IEC 62047-3
Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing
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| Organization: | IEC |
| Publication Date: | 1 August 2006 |
| Status: | active |
| Page Count: | 24 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanic
This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
Document History
IEC 62047-3
August 1, 2006
Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing
This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm...