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IEC 62047-3

Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing

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Organization: IEC
Publication Date: 1 August 2006
Status: active
Page Count: 24
ICS Code (Other semiconductor devices): 31.080.99
scope:

This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.

This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

Document History

IEC 62047-3
August 1, 2006
Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing
This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm...

References

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