Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing
|Publication Date:||1 August 2006|
|ICS Code (Other semiconductor devices):||31.080.99|
This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanic
This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.