CENELEC - EN 62047-18
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
active, Most Current
| Organization: | CENELEC |
| Publication Date: | 1 September 2013 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 specifies the method for bend testing of
thin film materials with a length and width under 1 mm and a
thickness in the range between 0,1 μm and 10 μm. Thin films are
used as main structural materials for Micro-electromechani
The main structural materials for MEMS, micromachines, etc., have special features, such as a few micron meter size, material fabrication by deposition, photolithography, and/ or nonmechanical machining test piece. This International Standard specifies the bend testing and test piece shape for micro-sized smooth cantilever type test pieces, which enables a guarantee of accuracy corresponding to the special features.
Document History
EN 62047-18
September 1, 2013
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
This part of IEC 62047 specifies the method for bend testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 10 μm. Thin films are used as...