CEI EN 62276
Single crystal wafers for surface acoustic wave (SAW) devices applications - Specifications and measuring method
|Publication Date:||1 November 2013|
|ICS Code (Piezoelectric devices):||31.140|
This International Standard applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.