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IEC 62047-1

Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions

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Organization: IEC
Publication Date: 1 September 2005
Status: inactive
Page Count: 58
ICS Code (Other semiconductor devices): 31.080.99

Document History

IEC 62047-1
January 1, 2016
Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices
IEC 62047-1
September 1, 2005
Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions
A description is not available for this item.

References

This document is referenced by:
IEC 62047-14 - Semiconductor devices – Micro-electromechanical devices – Part 14: Forming limit measuring method of metallic film materials
Published by IEC on February 1, 2012
This part of IEC 62047 describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 μm to 300 μm. The metallic film materials...
This document is referenced by:
IEC 60876-1 - Fibre optic interconnecting devices and passive components – Fibre optic spatial switches – Part 1: Generic specification
Published by IEC on August 1, 2014
This part of IEC 60876 applies to fibre optic switches possessing all of the following general features: – they are passive in that they contain no optoelectronic or other transducing elements; –...
This document is referenced by:
EN 60876-1 - Fibre optic interconnecting devices and passive components - Fibre optic spatial switches - Part 1: Generic specification
Published by CENELEC on October 1, 2014
This part of IEC 60876 applies to fibre optic switches possessing all of the following general features: - they are passive in that they contain no optoelectronic or other transducing elements; -...
This document is referenced by:
CEI EN 62047-14 - Semiconductor devices - Micro-electromechanical devices Part 14: Forming limit measuring method of metallic film materials
Published by CEI on April 1, 2013
This part of IEC 62047 describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 μm to 300 μm. The metallic film materials...
This document is referenced by:
CEI EN 60876-1 - Fibre optic interconnecting devices and passive components - Fibre optic spatial switches Part 1: Generic specification
Published by CEI on March 1, 2015
This part of IEC 60876 applies to fibre optic switches possessing all of the following general features: – they are passive in that they contain no optoelectronic or other transducing elements; –...
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