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BSI - BS EN 62047-3

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

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Organization: BSI
Publication Date: 30 November 2006
Status: active
Page Count: 12
ICS Code (Other semiconductor devices): 31.080.99

Document History

BS EN 62047-3
November 30, 2006
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
A description is not available for this item.

References

This document references:
IEC 62047-2 - Semiconductor devices – Micro-electromechanical devices – Part 2: Tensile testing method of thin film materials
Published by IEC on August 1, 2006
This International Standard specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 μm, which are main structural materials for...
This document references:
EN 62047-2 - Semiconductor devices Micro-electromechanical devices Part 2: Tensile testing method of thin film materials
Published by CENELEC on September 1, 2006
A description is not available for this item.
This document references:
ISO 17561 - Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for elastic moduli of monolithic ceramics at room temperature by sonic resonance
Published by ISO on July 1, 2016
This International Standard describes the method of test for determining the dynamic elastic moduli of fine ceramics at room temperature by sonic resonance. This International Standard is for fine...
This document is referenced by:
BS EN 62047-12 - Semiconductor devices - Micro-electromechanical devices Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Published by BSI on November 30, 2011
A description is not available for this item.
This document is referenced by:
BS EN 62047-8 - Semiconductor devices - Micro-electromechanical devices Part 8: Strip bending test method for tensile property measurement of thin films
Published by BSI on June 30, 2011
A description is not available for this item.
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