ISO 19606
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy
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| Organization: | ISO |
| Publication Date: | 1 February 2017 |
| Status: | active |
| Page Count: | 32 |
| ICS Code (Advanced ceramics): | 81.060.30 |
scope:
This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
Document History
April 11, 2023
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical...
ISO 19606
February 1, 2017
Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy
This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical...