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ISO TS 25138

Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry

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Organization: ISO
Publication Date: 1 August 2019
Status: active
Page Count: 48
ICS Code (Chemical analysis): 71.040.40
scope:

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

 

Document History

ISO TS 25138
August 1, 2019
Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method...
December 1, 2010
Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry
This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films....

References

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