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IEST - RP-CC012.2

CONSIDERATIONS IN CLEANROOM DESIGN

inactive
Organization: IEST
Publication Date: 1 June 2007
Status: inactive
Page Count: 60
scope:

This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically confront cleanroom designers and users.

Document History

IEST-RP-CC012
February 1, 2015
CONSIDERATIONS IN CLEANROOM DESIGN
This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically...
RP-CC012.2
June 1, 2007
CONSIDERATIONS IN CLEANROOM DESIGN
This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically...

References

This document references:
IEST-RP-CC019 - Qualifications for Organizations Engaged in the Testing and Certification of Cleanrooms and Clean-Air Devices
Published by IEST on January 1, 2006
This Recommended Practice (RP) defines recommended qualifications for organizations engaged in the testing and certification of cleanrooms, clean-air devices, HEPA- and ULPA-filtered systems, and...
This document references:
NFPA 318 - Standard for the Protection of Semiconductor Fabrication Facilities
Published by NFPA on January 1, 2018
This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled...
This document references:
IEST-RP-CC028 - MINIENVIRONMENTS
Published by IEST on December 1, 2002
The purpose of this document is to provide a framework for describing minienvironments for microelectronics and similar applications. Applications, planning, design, and evaluation are discussed in...
This document references:
IEST-RP-CC022 - ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
Published by IEST on January 1, 2004
This Recommended Practice (RP) discusses methods for specifying and evaluating the effectiveness of techniques for controlling electrostatic charge. Proper control of electrostatic charge may reduce...
This document references:
ISO 2631-2 - Mechanical Vibration and Shock - Evaluation of Human Exposure to Whole-Body Vibration - Part 2: Vibration in Buildings (1 Hz to 80 Hz)
Published by ISO on April 1, 2003
This part of ISO 2631 concerns human exposure to whole-body vibration and shock in buildings with respect to the comfort and annoyance of the occupants. It specifies a method for measurement and...
This document is referenced by:
IEST-RP-NANO200 - Planning of Nanoscale Science and Technology Facilities: Guidelines for Design, Construction, and Start-up
Published by IEST on July 1, 2013
This Recommended Practice (RP) is an overview of factors involved in the design, start-up, and operation of facilities in the field of nanotechnology. The overview focuses on the unique...
This document is referenced by:
ASTM E2217 - Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas
Published by ASTM on April 1, 2012
The purpose of this practice is to provide design and construction guidelines for contamination controlled facilities used in the assembly and integration of aerospace hardware. The guidelines herein...
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