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DIN 32564-1

Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

active, Most Current
Organization: DIN
Publication Date: 1 May 2004
Status: active
Page Count: 6
ICS Code (Precision mechanics): 39.020
ICS Code (Precision mechanics. Jewellery (Vocabularies)): 01.040.39

Document History

DIN 32564-1
May 1, 2004
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.
June 1, 2003
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.

References

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