BSI - BS IEC 62047-29
Semiconductor devices - Micro-electromechanical devices Part 29: Electromechanical relaxation test method for freestanding conductive thin films under room temperature
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| Organization: | BSI |
| Publication Date: | 31 March 2018 |
| Status: | active |
| Page Count: | 16 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
BS IEC 62047-29
March 31, 2018
Semiconductor devices - Micro-electromechanical devices Part 29: Electromechanical relaxation test method for freestanding conductive thin films under room temperature
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