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IEC 62047-21

Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials

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Organization: IEC
Publication Date: 1 June 2014
Status: active
Page Count: 30
ICS Code (Other semiconductor devices): 31.080.99
scope:

This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.

Document History

IEC 62047-21
June 1, 2014
Semiconductor devices – Micro-electromechanical devices – Part 21: Test method for Poisson's ratio of thin film MEMS materials
This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems...

References

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