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BSI - BS EN 62047-22

Semiconductor devices — Micro-electromechanical devices Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates

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Organization: BSI
Publication Date: 31 October 2014
Status: active
Page Count: 14
ICS Code (Other semiconductor devices): 31.080.99
ICS Code (Other graphical symbols): 01.080.99

Document History

BS EN 62047-22
October 31, 2014
Semiconductor devices — Micro-electromechanical devices Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
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References

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